Fitz-Gerald, J. ; Pennycook, S. ; Gao, H. ; Krishnamoorthy, V. ; Marcinka, J. ; Glenn, W. ; Singh, R. K.
Pub. info.:
Advances in laser ablation of materials : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.105-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Raman, R. ; Law, M. E. ; Krishnamoorthy, V. ; Jones, K. S.
Pub. info.:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.61-, 1998. Warrendale, Pa.. MRS - Materials Research Society