1.
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Conference Proceedings
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Wells, G. ; Hermans, J. ; Watso, R. ; Kang, Y.-S. ; Morton, R. ; Kocsis, M.K. ; Okoroanyanwu, U. ; De Bisschop, P. ; Stepanenko, N. ; Ronse, K.G.
Pub. info.: |
Optical Microlithography XVII. pp.91-98, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
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2.
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Conference Proceedings
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De Bisschop, P. ; Kocsis, M.K. ; Bruls, R. ; Grenville, A. ; Van Peski, C.
Pub. info.: |
Optical Microlithography XVII. pp.116-123, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|
3.
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Conference Proceedings
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Okoroanyanwu, U. ; Stepanenko, N. ; Vereecke, G. ; Eliat, A. ; Kocsis, M.K. ; Kang, Y.S. ; Jonckheere, R.M. ; Conard, T. ; Ronse, K.G.
Pub. info.: |
Optical Microlithography XVII. pp.487-503, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|
4.
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Conference Proceedings
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Kocsis, M.K. ; De Bisschop, P. ; Bruls, R. ; Grenville, A. ; Van Peski, C.
Pub. info.: |
Optical Microlithography XVII. pp.1679-1688, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|