1.

Conference Proceedings
Conference Proceedings
1. Generation of Oxidation Induced Stacking Faults in CZ Silicon Wafers
Sueoka,K. ; Akatsuka,M. ; Nishihara,K. ; Yamamoto,T. ; Kobayashi,S.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1737-1742,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
2.

Conference Proceedings
Conference Proceedings
2. In-situ process monitoring in metal deposition processes
Kobayashi,S. ; Nishitani,E. ; Shimamura,H. ; Yajima,A. ; Kishimoto,S. ; Yoneoka,Y. ; Uchida,H. ; Morioka,N.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing.  pp.80-90,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2637