1.

Conference Proceedings

Conference Proceedings
Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.224-233,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings

Conference Proceedings
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679