MICRO-RBS ANALYSIS OF MASKLESSLY FABRICATED STRUCTURES
- Author(s):
Kinomura, A. Takai, M. Matsuo, T. Satou, M. Kiuchi, M. Fujii, K. Namba, S. - Publication title:
- Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 128
- Pub. Year:
- 1989
- Page(from):
- 743
- Page(to):
- 748
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990012 [1558990011]
- Language:
- English
- Call no.:
- M23500/128
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
EVALUATION OF COMPOSITIONAL CHANGE IN MASKLESSLY DEPOSITED LINES BY MICRO-RBS ANALYSIS
Materials Research Society |
7
Conference Proceedings
SUPPRESSION OF ION-INDUCED CHARGE COLLECTION BY HIGH-ENERGY B+-IMPLANTED LAYER
MRS - Materials Research Society |
Materials Research Society |
North-Holland |
Materials Research Society |
North-Holland |
Materials Research Society |
10
Conference Proceedings
LASER INDUCED CHEMICAL ETCHING OF COMPOSITE STRUCTURE OF FERRITE AND SENDUST
Materials Research Society |
Materials Research Society |
11
Conference Proceedings
Dynamic behavior of nano second pulsed Nd:glass laser annealing in ion implanted silicon
North Holland |
6
Conference Proceedings
CONTROL OF ETCHING IN LASER-CHEMICAL REACTION OF Mn-Zn FERRITE BY MeV ION IMPLANTATION
Materials Research Society |
Materials Research Society |