MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK. pp.267-274, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Infrared Detectors and Focal Plane Arrays VI : 25-27 April 2000, Orlando, USA. pp.166-172, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.441-448, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
A collection of technical papers, AIAA Atmospheric Flight Mechanics Conference, Montreal, Canada, 6-9 August 2001. pp.115-120, 2001. Reston VA. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : AIAA Atmospheric Flight Mechanics Conference