1.

Conference Proceedings

Conference Proceedings
Chung, U. I. ; Hah, S. R. ; Han, J. H. ; Hong, C. K. ; Kang, G. W. ; Kim, K. H.
Pub. info.: Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.33-44,  2000.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 566
2.

Technical Paper

Technical Paper
Kim, K. H. ; Kim, C. ; Rho, O. H.
Pub. info.: AIAA paper.  pp.1-8,  2000.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Fluids Conference and Exhibit
Ser. no.: 2000