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29 results

Conference Proceedings

1. Bonding technologies ofr silicon scanning mirror having vertical comb fingers

Lee, J.-H. ; Ko, Y.-C. ; Choi, B.-S. ; Kim, J.-M. ; Jeon, D.-Y.

Pub. info.:	Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.428-435, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4592

Conference Proceedings

2. Effect of Viscosity of Liquid Resin on Resin Self-Alignment Capability

Kim, J.-M. ; Shin, Y.-E. ; Fujimoto, K.

Pub. info.:	Eco-materials processing & design : ISEPD-4, proceedings of the 4th International Symposium on Eco-Materials Processing & Design, Gyungpodae, Korea, February 4-6, 2003. pp.12-17, 2003. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	439

Conference Proceedings

3. Lithographic importance of acid diffusion in chemically amplified resists

Noh, C.-H. ; Kim, J.-Y. ; Lee, H.-C. ; Hwang, O.-C. ; Cho, S.-H. ; Song, K.-Y. ; Kim, J.-M.

Pub. info.:	Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.269-280, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5753(1)

Conference Proceedings

4. Production and Properties of Glass-Ceramic from Incinerator Fly Ash

Kim, H.-S. ; Kim, J.-M. ; Oshikawa, T. ; Ikeda, K.

Pub. info.:	Eco-materials processing & design : ISEPD-4, proceedings of the 4th International Symposium on Eco-Materials Processing & Design, Gyungpodae, Korea, February 4-6, 2003. pp.180-185, 2003. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	439

Conference Proceedings

5. Fabrication of micromachined ceramic thin-film-type pressure sensors for overpressure tolerance and its characteristics

Chung, G.-S. ; Kim, J.-M.

Pub. info.:	Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.11-18, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5276

Conference Proceedings

6. Measurement Method of Carbon Char Content from Industry Sludge

Kim, H.-S. ; Kim, J.-M.

Pub. info.:	Eco-materials processing & design : ISEPD-4, proceedings of the 4th International Symposium on Eco-Materials Processing & Design, Gyungpodae, Korea, February 4-6, 2003. pp.137-142, 2003. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	439

Conference Proceedings

7. Laser TV for home theater

Lee, J.-H. ; Mun, Y.-K. ; Do, S.-W. ; Ko, Y.-C. ; Kong, D.-H. ; Choi, B.-S. ; Kim, J.-M. ; Hong, C.-W. ; Jeon, D.-Y.

Pub. info.:	Projection Displays VIII. pp.138-146, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4657

Conference Proceedings

8. A new method for correcting proximity and fogging effects by using the EID model of variable shaped beam for 65-nm node [5853-07]

Park, E.-S. ; Cho, H.-J. ; Kim, J.-M. ; Choi, S.-S.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.58-65, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

Conference Proceedings

9. A study of storage life extension for high performance chemically amplified resist coated blanks [5853-03]

Yang, S.-J. ; Seo, S.-M. ; Ko, S.-H. ; Cha, H.-S. ; Kang, G.-W. ; Nam, K.-S. ; Seo. W.-W. ; Jung, W.-K. ; Cho, H.-K. ; Kim, J.-M. ; Choi, S.-S.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.20-30, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

10.

Conference Proceedings

10. Evaluation of EA-PSM opaque repair on 90-nm lithography

Kim, D.-W. ; Lee, J.-K. ; Koo, S.H. ; Lee, D.-H. ; Kim, J.-M. ; Choi, S.-S.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.484-495, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

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