1.

Conference Proceedings
Conference Proceedings
1. Damage Relaxation Pre-Activation Anneal in Al-Implanted SiC
Bahng, W. ; Song, G.H. ; Kim, N.K. ; Kim, S.C. ; Seo, K.S. ; Kim, H.W. ; Kim, E.D.
Pub. info.: Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden.  pp.617-620,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 433-436
2.

Conference Proceedings
Conference Proceedings
2. Improvement of CD controllability in developer process
Kyoda, H. ; Okouchi, A. ; Takeguchi, H. ; Kim, H.W. ; Yamamoto, T. ; Yoshihara, K.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1353-1365,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039