Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.459-462, 1988. Pittsburgh, Pa.. Materials Research Society
Kawasaki, M. ; Kasatani, K. ; Sato, A. ; Sato, H. ; Nishi, N.
Pub. info.:
Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.69-72, 1989. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.217-220, 1988. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.231-236, 1988. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.387-392, 1987. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.305-310, 1989. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.371-374, 1989. Pittsburgh, Pa.. Materials Research Society