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Wavelength-Invariant Resist Composed of Bimetallic Layers

Author(s):
Tu, Y.
Karimi, M.
Morawej, N.
Lennard, W.N.
Simpson, T.W.
Peng, J.
Kavanagh, K.L.
Chapman, G.H.
3 more
Publication title:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
745
Pub. Year:
2003
Page(from):
73
Page(to):
78
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996823 [1558996826]
Language:
English
Call no.:
M23500/745
Type:
Conference Proceedings

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