1.

Conference Proceedings

Conference Proceedings
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu.N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.567-577,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings

Conference Proceedings
Vorobev, A.N. ; Komissarov, A.E. ; Bogdanov, M.V. ; Karpov, S.Yu. ; Lovisus, A.A. ; Makarov, Yu.N. ; Lowsy, S.A.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.216-223,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
3.

Conference Proceedings

Conference Proceedings
Bogdanov, M.V. ; Demina, S.E. ; Karpov, S.Yu. ; Kulik, A.V. ; Ofengeim, D.Kh. ; Ramm, M.S. ; Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Makarov, Yu.A. ; Helava, H.
Pub. info.: Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.23-28,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 742
4.

Conference Proceedings

Conference Proceedings
Bogdanov, M.V. ; Karpov, S.Yu. ; Kulik, A.V. ; Ramm, M.S. ; Makarov, Yu.N. ; Schlesser, R. ; Dalmau, R.F. ; Sitar, Z.
Pub. info.: GaN and related alloys - 2002 : symposium held December 2-6, Boston, Massachusetts, U.S.A..  pp.187-192,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 743
5.

Conference Proceedings

Conference Proceedings
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.567-577,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
6.

Conference Proceedings

Conference Proceedings
Semennikov, A.K. ; Karpov, S.Yu. ; Ramm, M.S. ; Romanov, A.E. ; Makarov, Yu.N.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.383-386,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
7.

Conference Proceedings

Conference Proceedings
Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Karpov, S.Yu. ; Ramm, M.S. ; Segal, A.S. ; Makarov, Yu.A. ; Helava, H.
Pub. info.: Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden.  pp.979-982,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 433-436
8.

Conference Proceedings

Conference Proceedings
Segal, A.S. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu N.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.229-236,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
9.

Conference Proceedings

Conference Proceedings
Matukov, I.D. ; Kalinin, D.S. ; Bogdanov, M.V. ; Karpov, S.Yu. ; Ofengeim, D.Kh. ; Ramm, M.S. ; Barash, J.S. ; Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Ramm, M.G. ; Helava, H. ; Makarov, Yu.N.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.63-66,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
10.

Conference Proceedings

Conference Proceedings
Kulik, A.V. ; Bogdanov, M.V. ; Karpov, S.Yu. ; Ramm, M.S. ; Makarov, Yu.N.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.67-70,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460