1.

Conference Proceedings
Conference Proceedings
1. Use of Non-Contact Resistivity Measurements for Epitaxy: Surface Charge Profiler Method
Danel, A. ; Tardif, F. ; Kamarinos, G. ; Nguyen, M.C.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.444-455,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
2.

Conference Proceedings
Conference Proceedings
2. Sensitivity of the surface charge profiler (SCP) method for some monitoring applications
Danel, A. ; Lardin, T. ; Kamarinos, G. ; Tardif, F.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.394-403,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
3.

Conference Proceedings
Conference Proceedings
3. Detection of noble metals in HF based chemistries by microwave photoconductive decay (μ-PCD)
Tardif, F. ; Joly, J.-P. ; Courteaux, A. ; Straube, U. ; Danel, A. ; Kamarinos, G.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.385-393,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
4.

Conference Proceedings
Conference Proceedings
4. MONITORING OF NOBLE METALS IN HF BASED CHEMISTRIES USING μ-PCD,SPV,SCI, and SCP
Danel, A. ; Straube, U. ; Kamarinos, G. ; Kamieniecki, E. ; Tardif, F.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.400-407,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
5.

Conference Proceedings
Conference Proceedings
5. Characterization of copper and nickel contamination using recombination lifetime techniques
Walz, D. ; Joly, J.P. ; Suarez, M. ; Palleau, J. ; Kamarinos, G.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.64-72,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30
6.

Conference Proceedings
Conference Proceedings
6. Comparative study of on-line lifetime techniques for the monitoring of metallic micro contamination for ULSI microelectronics
Walz, D. ; Joly, J.P. ; Kamarinos, G. ; Barla, K.
Pub. info.: ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands.  pp.35-43,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-30