1.

Conference Proceedings
Conference Proceedings
1. Large Scaled ALD/PECVD Reactor for Flat Panel Display Application
K. Murata ; K. Washio ; N. Miyatake ; Y. Mori ; H. Tachibana
Pub. info.: Atomic layer deposition applications 3.  pp.31-38,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)
2.

Conference Proceedings
Conference Proceedings
2. MMICs Using SiGe BiCMOS for Ubiquitous Wireless Network
T. Masuda ; N. Shiramizu ; T. Nakamura ; K. Washio
Pub. info.: ULSI process integration 5.  pp.433-444,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)