1.

Conference Proceedings
Conference Proceedings
1. Dielectric Properties of (ZrxTi₁₋x)O₂ Film on Ru/Si0₂/Si Substrates Deposited by the Atomic Layer Deposition Using [Zr(OtBu)₄ + Ti(OtBu)₄] Cocktail Source
J. Lim ; K. Cho ; K. Kim ; C. Yoo ; S. Kim ; U. Chung ; J. Moon
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.153-160,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
2.

Conference Proceedings
Conference Proceedings
2. Electrical Characteristics of Ge-Nanocrystal Embedded MOS Capacitors for Non-Volatile-Memory Application
S. Choi ; Y. Park ; K. Cho ; T. Kang ; T. Kim ; B. Park ; S. Kim
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment.  pp.449-456,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(2)