Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California. pp.382-395, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1999 : industrial and commercial applications of smart structures technologies : 2-4 March, 1999, Newport Beach, California. pp.308-328, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering