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Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.3-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.59-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Lee, C. ; Itoh, T. ; Chu, J. ; Ohashi, T. ; Maeda, R. ; Schroth, A. ; Suga, T.
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Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.35-, 1997. Pittsburgh, PA. MRS - Materials Research Society