Ayoz, S. ; Tuncer, H. M. ; Udrea, F. ; Ionescu, A. ; Fritschi, R.
Pub. info.:
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain. pp.527-534, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering