Smart structures and materials 2004 : modeling, signal processing, and control : 15-18 March 2004, San Diego, California, USA. pp.112-121, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hirano, Y. ; Ipposhi, T. ; Thai, D. H. ; Iwamatsu, T. ; Ikeda, T. ; Tsujiuchi, M. ; Maegawa, S. ; Inuishi, M. ; Ohji, Y.
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Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.60-64, 2004. Pennington, N.J.. Electrochemical Society
Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.661-664, 2004. Zuerich. Trans Tech Publications
Oikawa, K. ; Kamiyama, T. ; Kanno, R. ; Izumi, F. ; Ikeda, T. ; Chakoumakos, B.C.
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EPDIC 8 : proceedings of the eighth European Powder Diffraction Conference, held May 23-26, 2002 in Uppsala, Sweden. pp.337-340, 2004. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.929-939, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Yamanaka, E. ; Kanamitsu, S. ; Hirano, T. ; Tanaka, S. ; Ikeda, T. ; Ikenaga, O. ; Kawashima, T. ; Narukawa, S. ; Kobayashi, H.
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Photomask and Next-Generation Lithography Mask Technology XI. pp.257-264, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hashimoto, K. ; Fujise, H. ; Nojima, S. ; Ito, T. ; Ikeda, T.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI. pp.471-480, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering