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A Comparison Between Micromachined Piezoresistive and Capacitive Pressure Sensors

Author(s):
Baney, W. ( Delco Electronics Corp. )
Chilcott, D.
Huang, X.
Long, S.
Siekkinen, J.
Sparks, D.
Staller, S.
2 more
Publication title:
1997 International Truck and Bus Meeting and Exposition : SAE technical paper
Title of ser.:
Society of Automotive Engineers technical paper series
Ser. no.:
1997
Pub. Year:
1997
No.:
973241
Paper no.:
973241
Page(from):
61
Page(to):
64
Pub. info.:
Warrendale, Penn.: Society of Automotive Engineers
ISSN:
01487191
Language:
English
Call no.:
S10400
Type:
Technical Paper

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