Lee, S. S. ; Galovich, C. S. ; Fuchs, K. P. ; Kwong, D,.L. ; Hirvoven, J. ; Huang, J.
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.217-222, 1989. Pittsburgh, Pa.. Materials Research Society
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.57-64, 1985. Pittsburgh, Pa.. Materials Research Society