Karoui, A. ; Karoui, F.S. ; Rozgonyi, G.A. ; Hourai, M. ; Sueoka, K.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.670-681, 2002. Pennington, NJ. Electrochemical Society
Karoui, A. ; Karoui, F.S. ; Rozgonyi, G.A. ; Hourai, M. ; Sueoka, K.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.670-681, 2002. Pennington, NJ. Electrochemical Society
Hourai, M. ; Ono, T. ; Umeno, S. ; Tanaka, T. ; Asayaoia, E. ; Nishikawa, H. ; Sano, M. ; Tsuya, H.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.19-34, 2001. Pennington, N.J.. Electrochemical Society