1.

Conference Proceedings
Conference Proceedings
1. Measurement of Minority Carrier Lifetime in Epitaxial Silicon Layers
Kitamura, T. ; Tamura, F. ; Hara, T. ; Hourai, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.533-543,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13
2.

Conference Proceedings
Conference Proceedings
2. Defects Behavior on p/p+ Epitaxial Wafers During Low Temperature Device Processing
Hourai, M. ; Asayama, E. ; Onno, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.214-225,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13