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Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.357-364, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.587-593, 1994. Pennington, NJ. Electrochemical Society
Hoff, A.M. ; Persson, E.J. ; Chacon, J. ; DeSelms, B.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.522-529, 1994. Pennington, NJ. Electrochemical Society