1.

Conference Proceedings
Conference Proceedings
1. Post-Implantation Annealing in a Silane Ambient Using Hot-Wall CVD
Rao, S.P. ; Bergamini, F. ; Nipoti, R. ; Hoff, A.M. ; Oborina, E. ; Saddow, S.E.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.839-842,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings
Conference Proceedings
2. Fast Non-Contact Dielectric Characterization for SiC MOS Processing
Hoff, A.M. ; Oborina, E.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.1035-1038,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529