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11 results

Conference Proceedings

1. A New Compressively Strained InGaAs/AlGaAs p-Type Quantum Well Infrared Photodetector with Ultralow Dark Current and Detective Peaks in the LWIR and MWIR Bands

Chu, J. ; Li, Sheng S. ; Wang, Y.H. ; Ho, P.

Pub. info.:	Proceedings of the Third International Symposium on long wavelength infrared detectors and arrays : physics and applications III. pp.126-138, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-28

Conference Proceedings

2. A Normal Incidence Strained Layer Superlattice Infrared Photodetector with 19.2 μm Peak Detection Wavelength

Chu, J. ; Li, Sheng S. ; Singh, A. ; Ho, P.

Pub. info.:	Proceedings of the Fifth International Symposium on Long Wavelength Infrared Detectors and Arrays: Physics and Applications. pp.63-68, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-33

Conference Proceedings

3. Modeling Aluminum Etch Chemistry in High Density Plasmas

Meeks, E. ; Ho, P. ; Buss, R.

Pub. info.:	Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.283-290, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-9

Conference Proceedings

4. Comparison of Material Anisotropy in Flexible Poly (Arylether) with Rigid Polyamide Thin Films

Chao, T. ; Morgen, M. ; Lee, J.K. ; Ryan, E.T. ; Zhao, J.H. ; Malik, I. ; Ho, P.

Pub. info.:	Dielectric material integration for microelectronics. pp.95-102, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-3

Conference Proceedings

5. Chemical Kinetics for Modeling Silicon Epitaxy from Chlorosilanes

Ho, P. ; Balakrishna, A. ; Chacin, J.M. ; Thilderkvist., A. ; Haas, B. ; Comita, P.B.

Pub. info.:	Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.117-122, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-23

Conference Proceedings

6. PHOTOCONDUCTIVE (PC) AND PHOTOVOLTAIC (PV) DUAL-MODE OPERATION III-V QUANTUM WELL INFRARED PHOTODETECTORS FOR 2-14 μm IR DETECTION

Li, Sheng S. ; Wang, Y.H. ; Chuang, M.Y. ; Ho, P.

Pub. info.:	Infrared detectors : materials, processing, and devices : symposium held April 14-16, 1993, San Francisco, California, U.S.A.. pp.3-8, 1994. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	299

Conference Proceedings

7. DIRECT MEASUREMENT OF THE REACTIVITY OF NH AND OH ON A SILICON NITRIDE SURFACE

Buss, R. J. ; Ho, P. ; Fisher, E. R. ; Breiland, William G.

Pub. info.:	Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.51-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	334

Conference Proceedings

8. Si Atom Density Profiles In a Rotating Disk CVD Reactor

Ho, P. ; Breiland, W.G. ; Coltrin, M.E.

Pub. info.:	Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition. pp.8-12, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-2

Conference Proceedings

9. Laser Diagnostics and Numerical Modelling of Si Atom Density During CVD from Silane

Coltrin, M.E. ; Ho, P. ; Breiland, W.G.

Pub. info.:	AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California. 1994. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE meeting [papers]
Ser. no.:	1994

10.

Conference Proceedings

10. Mechanistic Studies of the CVD of Silicon Nitride from SiF4 and NH3

Buss, R.J. ; Ho, P.

Pub. info.:	Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition. pp.357-361, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-2

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