1.

Conference Proceedings
Conference Proceedings
1. HEAVY METAL AND ORGANIC CLEANING EFFICIENCY OPTIMIZATION AND MONITORING FOR REAL-TIME, IN-LINE PROCESS CONTROL BY SURFACE PHOTOVOLTAGE
Jastrzebski, L. ; Henley, W. ; DeBusk, D. ; Haddad, N. ; Lowell, J. ; Wenner, V. ; Nauka, K. ; Persson, E.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.530-536,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. Enhanced Hydrogenation Due to Ultrasound Treatment in Polycrystalline Silicon: New Approach to Thin Film Defect Engineering
Ostapenko, S. ; Henley, W. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.405-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
3.

Conference Proceedings
Conference Proceedings
3. Analysis of Hydrogenation in Thin Film Polycrystalline Silicon Using Surface Photovoltage Measurement Technique
Henley, W. ; Ostepenko, S. ; Karimpanakkel, S. ; Jastrzebski, L. ; Lagowski, J.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.265-268,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35