1.

Conference Proceedings
Conference Proceedings
1. Nanoscale surface texturing by impact of accelerated condensed-gas nanoparticles
Allen, L.P. ; Fenner, D.B. ; Santeufemio, C. ; Brooks, W. ; Hautala, J. ; Shao, Y.
Pub. info.: Complex mediums III : beyond linear isotropic dielectrics : 8-10 July 2002, Seattle, [Washington] USA.  pp.225-232,  2002.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4806
2.

Conference Proceedings
Conference Proceedings
2. Infusion Processing: An Alternative to Plasma Technology for Semiconductor Device Manufacturing (Invited paper)
Hautala, J. ; Skinner, W. ; Sherman, S. ; Shao, Y. ; Borland, J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.118-132,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
3.

Conference Proceedings
Conference Proceedings
3. Etching and surface smoothing with gas-cluster ion beams
Fenner, D. B. ; Torti, R. P. ; Allen, L. P. ; Toyoda, N. ; Kirkpatrick, A. R. ; Greer, J. A. ; DiFilippo, V. ; Hautala, J.
Pub. info.: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.27-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 585
4.

Conference Proceedings
Conference Proceedings
4. (11.5) 4:40 - 5:00 PM - Ge & Ge+B Infusion Doping and Deposition for Ultra-shallow Junction, Blanket and Localized SiGe or Ge Formation on Cz and SOI Wafers
Borland, J. ; Hautala, J. ; Tabat, M. ; Gwinn, M. ; Tetreault, T. ; Skinner, W.(J.O.B. Technologies)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.769-784,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07
5.

Conference Proceedings
Conference Proceedings
5. Smoothing Thin Films With Gas-Cluster Ion Beams
Fenner, D.B. ; Hautala, J. ; Allen, L.P. ; Greer, J.A. ; Skinner, W.J. ; Budnick, J.I.
Pub. info.: Magnetic materials, structures and processing for information storage: symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.F10.3-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 614
6.

Conference Proceedings
Conference Proceedings
6. Simulations and Argon-Cluster-Ion Smoothing of Surfaces
Fenner, D.B. ; Dean, D.W. ; DiFilippo, V. ; Allen, L.P. ; Hautala, J. ; Mirkarimi, P.B.
Pub. info.: Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 647