1.

Conference Proceedings
Conference Proceedings
1. Plasma-assisted cleaning by electrostatics (PACE)
W. M. Lytle ; H. Shin ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Contamination removal from collector optics and masks: an essential step for next-generation lithography
H. Shin ; S. N. Srivastava ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518