Blank Cover Image

Geometry Dependence of Void Formation in Deep Submicron Poly-Buffered Locos Isolation Structures: Experimental Evidence of a Stress-Relaxation Model

Author(s):
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
94
Page(to):
100
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Geometry Dependence of Poly-Si Oxidation and its Application to Self-Align, Maskless Process for Nano-scale Vertical CMOS Structures

H. Cho, P. Kapur, P. Kalavade, K. Saraswat

Electrochemical Society
7 Conference Proceedings Mechanisms of Formation of Submicron Grain Structures by Severe Deformation

P.B. Prangnell, Y. Huang, M. Berta, P.J. Apps

Trans Tech Publications
2 Conference Proceedings Development of Poly Buffer Isolation Technology at CEERI

Andhare,P.N., Tandon,U.S., Joshi,B.C., Pathak,B.C., Chandra,S., Wadhawan,O.P.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings The Use of Metal Additions to Phosphoric Acid to Etch Polysilicon in Poly-Buffered LOCOS Processes

Pearce, Charles W., Chung, B. C.

MRS - Materials Research Society
3 Conference Proceedings The Thickness And Temperature Dependance Of Field Oxidation 3 Dimensional Behaviour. Example On Poly Buffer LOCOS Isolation

Deleonibus, S.

Electrochemical Society
9 Conference Proceedings CHARACTERIZATION OF TEXTURED ALUMINUM LINES AND MODELLING OF STRESS VOIDING

Wardle, S. C., Adams, B. L., Nichols, C. S., Smith, D. A.

MRS - Materials Research Society
4 Conference Proceedings Study of integration issues in shallow trench isolation for deep submicron CMOS technologies

Chatterjee,A., Mason,M.E., Joyner,K., Rogers,D., Mercer,D., Kuehne,J., Esquivel,A.L., Mei,P., Murtaza,S.S., Taylor,K.J., …

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Experimental Study of Self-Diffusion in Silicon Using Isotopically Enriched Structures

Ural, A., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society
5 Conference Proceedings Experimental Investigation of the Response of Different PLL Algorithms to Grid Disturbances

G.E. Kampitsis, A.P. Tsoumanis, K.C. Gallos, S.A. Papathanassiou, S.N. Manias

Trans Tech Publications
11 Conference Proceedings MECHAHISMS OF STRESS RELAZATION IN LOCOS STRUCTURES

Katzer, D., Nagel, J., Reiche, M., Hopfe, S.

Electrochemical Society
6 Conference Proceedings IMP copper seed layer formation with TaN barrier for deep submicron

Narayanan,B., Li,C.Y., Lee,K., Yu,B., Wu,J.J., Foo,P.D., Xie,J.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings MOLECULAR DYNAMICS SIMULATIONS AND EXPERIMENTAL EVIDENCE FOR DEEP PENETRATION BY CHANNELED IONS DURING LOW-ENERGY ION BOMBARDMENT OF III-V SEMICONDUCTORS

Stoffel, N. G., Schwartz, S. A., Pudensi, M. A. A., Kash, K., Florez, L. T., Harbison, J. P., Wilkens, B. J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12