Golecki, I. ; Maddox, R. L. ; Glass, H. L> ; Lin, a. L. ; Manasevit, H. M
Pub. info.:
Applied materials characterization : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.37-46, 1985. Pittsburgh, Pa.. Materials Research Society
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.323-328, 1985. Pittsburgh, Pa.. Materials Research Society