1.

Conference Proceedings

Conference Proceedings
Cresswell,M.W. ; Bonevich,J.E. ; Headley,T.J. ; Allen,R.A. ; Giannuzzi,L.A. ; Everist,S.C. ; Ghoshtagore,R.N. ; Shea,P.J.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.74-83,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings

Conference Proceedings
Villarrubia,J.S. ; Vladar,A.E. ; Lowney,J.R. ; Postek,M.T. ; Allen,R.A. ; Cresswell,M.W. ; Ghoshtagore,R.N.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.84-95,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998