1.

Conference Proceedings
Conference Proceedings
1. ELIMINATION OF SUBBOUNDARIES IN 0.5-μm-THCK Si-ON-INSULATOR FILMS PRODUCED BY ZMR
Geis, M.W. ; Chen, C.K. ; Smith, Henry I.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.567-570,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
2.

Conference Proceedings
Conference Proceedings
2. HOT JET ETCHING THROUGH STENCIL MASKS
Geis, M.W. ; Pang, S.W. ; Efremow, N.N.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.143-146,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76