1.
|
Conference Proceedings
|
L. Van Look ; J. Bekaert ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: |
Optical Microlithography XXI. 2 pp.69241Q-1-69241Q-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
|
2.
|
Conference Proceedings
|
J. Bekaert ; L. Van Look ; P. De Bisschop ; J. Van de Kerkhove ; G. Vandenberghe
Pub. info.: |
Lithography Asia 2008. 2 pp.714027-1-714027-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7140 |
|
3.
|
Conference Proceedings
|
J. Bekaert ; E. Hendrickx ; G. Vandenberghe
Pub. info.: |
Optical Microlithography XXI. 2 pp.69243A-1-69243A-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
|