1.

Conference Proceedings

Conference Proceedings
E. Hendrickx ; R. Birkner ; M. Kempsell ; A. Tritchkov ; G. Vandenberghe
Pub. info.: Photomask technology 2008.  1  pp.71221E-1-71221E-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
2.

Conference Proceedings

Conference Proceedings
J. Bekaert ; E. Hendrickx ; G. Vandenberghe
Pub. info.: Optical Microlithography XXI.  2  pp.69243A-1-69243A-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924