1.

Conference Proceedings
Conference Proceedings
1. In-Situ Oxygen Plasma Enhancement for Coherent Ti/TiN Barrier Metal Application
Lee, K.-B. ; Kwak, N.-J. ; Kim, S.-D. ; Kim, C.-T. ; Fu, J. ; Nahm, M.K. ; Diaz, R. ; Lai, C.S. ; Xu, Z. ; Han, B.B. ; Park, J.-G. ; Jang, W.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.333-338,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings
Conference Proceedings
2. A STUDY OF THE SURFACE TEXTURE OF POLYCRYSTALLINE PHOSPHOR FILMS USING ATOMIC FORCE MICROSCOPY
Revay, R. ; Schneir, J. ; Brower, D. ; Villarrubia, J. ; Fu, J. ; Cline, J. ; Hsieh, T. J. ; Wong-Ng, W.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.119-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343