1.

Conference Proceedings
Conference Proceedings
1. Pattern asymmetries in phase-edge imaging
Fritze,M. ; Cann,S.G. ; Wyatt,P.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.567-581,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Performance of excimer lasers as light sources for 193-nm lithography
Sedlacek,J.H.C. ; Doran,S.P. ; Fritze,M. ; Kunz,R.R. ; Rothschild,M. ; Uttaro,R.S. ; Corliss,D.A.
Pub. info.: Optical Microlithography X.  pp.874-881,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051