16th ESA Symposium on European Rocket and Balloon Programmes and Related Research, 2 - 5 June 2003, Sankt Gallen, Switzerland. pp.395-400, 2003. Noordwijk, The Netherlands. ESA Publications Division
16th ESA Symposium on European Rocket and Balloon Programmes and Related Research, 2 - 5 June 2003, Sankt Gallen, Switzerland. pp.369-374, 2003. Noordwijk, The Netherlands. ESA Publications Division
15th ESA Symposium on European Rocket and Balloon Programmes and Related Research, 28 - 31 May 2001, Biarritz, France. pp.357-362, 2001. Noordwijk, The Netherlands. ESA Publications Division
Berger, C. ; Schiwon, R. ; Trepte, S. ; Friedrich, M. ; Kubis, M. ; Horst, J ; Grandpierre, A. G.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX. pp.61523T-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering