1.

Conference Proceedings

Conference Proceedings
F. Li ; H. Mao ; X. Dong ; Q. Duan ; Q. Wang
Pub. info.: Second International Conference on Optoelectronic Science and Engineering '94 : 15-18 August 1994, Beijing, China.  pp.326-328,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2321
2.

Conference Proceedings

Conference Proceedings
L. Zhao ; Y. Dong ; F. Li
Pub. info.: Second International Conference on Optoelectronic Science and Engineering '94 : 15-18 August 1994, Beijing, China.  pp.200-202,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2321
3.

Conference Proceedings

Conference Proceedings
Y. Guo ; F. Li
Pub. info.: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V : 20-21 February 1995, Santa Clara, California.  pp.427-437,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2437