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Conference Proceedings

1. Ion Implantation Induced Deep Defects in n-Type 4H-Silicon Carbide

Evwaraye, A.O. ; Smith, S.R. ; Mitchel, W.C. ; Capano, M.A.

Pub. info.:	Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.175-180, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	742

Conference Proceedings

2. The Effect of Annealing on High-Resistivity and Semi-Insulating 4H-SiC

Smith, S.R. ; Evwaraye, A.O. ; Mitchel, W.C.

Pub. info.:	Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.277-282, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	742