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Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-？-nitride semiconductor device heterostructures

Author(s):
Schubert,M. ( Univ. Leipzig )
Kasic,A.
Figge,S.
Diesselberg,M.
Einfeldt,S.
Hommel,D.
Kohler,U.
As,D.J.
Off,J.
Kuhn,B.
Scholz,F.
Woollam,J.A.
Herzinger,C.M.
8 more
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4449
Pub. Year:
2001
Page(from):
58
Page(to):
68
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441638 [0819441635]
Language:
English
Call no.:
P63600/4449
Type:
Conference Proceedings

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