1.

Conference Proceedings

Conference Proceedings
Ishikawa, H. ; Egawa, T.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.34-38,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-02
2.

Conference Proceedings

Conference Proceedings
Sano, Y. ; Mita, J. ; Yamada, T. ; Makita, T. ; Kaifu, K. ; Ishikawa, H. ; Egawa, T. ; Jimbo, T.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.1511-1514,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
3.

Conference Proceedings

Conference Proceedings
Sano, Y. ; Mita, J. ; Yamada, T. ; Makita, T. ; Kaifu, K. ; Ishikawa, H. ; Egawa, T. ; Jimbo, T.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.1511-1514,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393