1.

Conference Proceedings
Conference Proceedings
1. Direct Simulation Monte Carlo of Inductively Coupled Plasma and Comparison with Experiment
Johannes, J. ; Bartel, T. ; Hebner, G. ; Woodworth, J. ; Economou, D.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.20-38,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. SELF-CONSISTENT SIMULATIONS OF RF GLOW DISCHARGES COUPLED WITH NEUTRAL TRANSPORT AND REACTION
Economou, D. ; Lymberopoulos, D.P.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.471-482,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
3.

Conference Proceedings
Conference Proceedings
3. Multiscale Modeling in Plasma Engineering and Parallels to Electrochemical Engineering
Economou, D.
Pub. info.: Tutorials in electrochemical engineering - mathematical modeling : proceedings of the International Symposium.  pp.296-302,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-14
4.

Conference Proceedings
Conference Proceedings
4. Modeling and Simulation of Inductively Coupled High Density Plasma Sources
Economou, D. ; Lymberopoulos, D.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.1-12,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
5.

Conference Proceedings
Conference Proceedings
5. Modeling and Simulation of Two-Dimensional Reactive Plasma Flow in Inductively Coupled Reactors
Lymberopoulos, D. ; Wise, R. ; Economou, D.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.588-595,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2