Optical properties of ZnSe diffractive optical elements for spot array generation
- Author(s):
- Ebata, K. ( Sumitomo Electric Industries, Ltd. (Japan) )
- Fuse, K. ( Sumitomo Electric Industries, Ltd. (Japan) )
- Shiozaki, M. ( Sumitomo Electric Industries, Ltd. (Japan) )
- Hattori, T. ( Sumitomo Electric Industries, Ltd. (Japan) )
- Publication title:
- Laser metrology and inspection : 14-15 June 1999, Munich, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3823
- Pub. Year:
- 1999
- Page(from):
- 224
- Page(to):
- 234
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819433091 [0819433098]
- Language:
- English
- Call no.:
- P63600/3823
- Type:
- Conference Proceedings
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