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11 results

Conference Proceedings

1. Fault modeling of electrostatic comb-drives for MEMS

Charlot,B. ; Moussouris,S. ; Mir,S. ; Courtois,B.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.398-405, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

2. Providing technology infrastructure for MEMS

Ribas,R.P. ; Veychard,D. ; Karam,J.M. ; Courtois,B.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.298-305, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

3. Thermal Transient Testing

Szekely,Vladimir ; Rencz,M. ; Courtois,B.

Pub. info.:	1996 International Symposium on Microelectronics : 8-10 October 1996, Minneapolis Convention Center, Minneapolis, Minnesota. pp.18-23, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2920

Conference Proceedings

4. Fault simulation of MEMS using HDLS

Charlot,B. ; Mir,S. ; Cota,E.F. ; Lubaszewski,M. ; Courtois,B.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.70-77, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

5. Advanced integrated solution for MEMS design

Liateni,K. ; Moulinier,D. ; Affour,B. ; Boutamine,H. ; Karam,J.M. ; Veychard,D. ; Courtois,B. ; Cao,A.D.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.161-170, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

6. Tool and method for the theremal transient evaluation of packages

Szekely,V. ; Rencz,M. ; Courtois,B.

Pub. info.:	Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.94-103, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3893

Conference Proceedings

7. Collective fabrication of gallium-arsenide-based microsystems

Karam,J. ; Courtois,B. ; Holjo,M. ; Leclercq,J.L. ; Viktorovitch,P.

Pub. info.:	Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.315-326, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2879

Conference Proceedings

8. Microsystem design framework based on tool adaptations and library developments

Karam,J.-M. ; Courtois,B. ; Rencz,M. ; Poppe,A. ; Szekely,V.

Pub. info.:	Microlithography and Metrology in Micromachining II. pp.236-245, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2880

Conference Proceedings

9. Integrated mixedtechnology design environment to support micro-electro-mechanical systems development

Karam,J.M. ; Courtois,B. ; Cao,A.D. ; Hofmann,K.

Pub. info.:	Micromachined Devices and Components IV. pp.278-286, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

10.

Conference Proceedings

10. Engineering tool set for monolithic and hybrid microsystem design

Boutamine,H. ; Karam,J.M. ; Courtois,B. ; Drake,P. ; Oudinot,J. ; El Tahawi,H. ; Cao,A. ; Rencz,M. ; Poppe,A. ; Szekely,V.

Pub. info.:	Microlithography and Metrology in Micromachining III. pp.76-84, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3225

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