1.

Conference Proceedings

Conference Proceedings
Palan, B. ; Torki, K. ; Courtois, B. ; Husak, M.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.97-104,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
2.

Conference Proceedings

Conference Proceedings
Kriaa, L. ; Youssef, W. ; Nicolescu, G. ; Martinez, S.O. ; Levitan, S.P. ; Martinez, J.A. ; Kurzweg, T.P. ; Jerraya, A.A. ; Courtois, B.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.64-70,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755