Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.97-104, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kriaa, L. ; Youssef, W. ; Nicolescu, G. ; Martinez, S.O. ; Levitan, S.P. ; Martinez, J.A. ; Kurzweg, T.P. ; Jerraya, A.A. ; Courtois, B.
Pub. info.:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.64-70, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering