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MEMS Fabrication for Wireless Communications Using Copper Interconnect Technology

Author(s):
Deligianni, H.
Cotte, J.M.
Jahnes, C.V.
Buchwalter, P.
Hoivik, N.
Krishnan, M
Tornello, J.
Magerlein, J.H.
Seeger, D.E.
4 more
Publication title:
Electrochemical processes in ULSI and MEMS : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-17
Pub. Year:
2005
Page(from):
341
Page(to):
352
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774727 [1566774721]
Language:
English
Call no.:
E23400/200417
Type:
Conference Proceedings

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