Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition
- Author(s):
Ren,Z.M. ( National Univ.of Singapore ) Lu,Y.-F. Mai,Z.H. Cheong,B.A. Chow,S.K. Wang,J.P. Chong,T.C. - Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3618
- Pub. Year:
- 1999
- Page(from):
- 520
- Page(to):
- 528
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430885 [0819430889]
- Language:
- English
- Call no.:
- P63600/3618
- Type:
- Conference Proceedings
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