1.
Conference Proceedings
Choi,S.-J. ; Kim,H.-W. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.:
Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA . Part1 pp.54-61, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3999
2.
Conference Proceedings
Kim,H.-W. ; Lee,S.-H. ; Kwon,K.-Y. ; Jung,D.-W. ; Lee,S. ; Yoon,K.-S. ; Choi,S.-J. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.:
Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA . Part2 pp.1100-1107, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3999
3.
Conference Proceedings
Chung,J.-H. ; Choi,S.-J. ; Kang,Y. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.:
Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA . Part1 pp.305-312, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3999
4.
Conference Proceedings
Yoon,K.-S. ; Jung,D.-W. ; Lee,S. ; Lee,S.-H. ; Choi,S.-J. ; Woo,S.-G. ; Moon,J.-T.
Pub. info.:
Advances in Resist Technology and Processing XVIII . 4345 pp.688-694, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
5.
Conference Proceedings
Vandenberghe,G.N. ; Kim,Y.-C. ; Delvaux,C. ; Lucas,K.D. ; Choi,S.-J. ; Ercken,M. ; Ronse,K. ; Vleeming,B.
Pub. info.:
Optical Microlithography XIV . 4346 pp.179-190, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
6.
Conference Proceedings
Kim,H.-W. ; Jung,D.-W. ; Lee,S. ; Choi,S.-J. ; Woo,S.-G. ; Kavanagh,R.J. ; Barclay,G.G. ; Blacksmith,R.F. ; Kang,D. ; Pohlers,G. ; Cameron,J.F. ; Mattia,J. ; Caporale,S. ; Penniman,T. ; Joesten,L.A. ; Thackeray,J.W.
Pub. info.:
Advances in Resist Technology and Processing XVIII . 4345 pp.776-783, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
7.
Conference Proceedings
Kang,Y. ; Woo,S.-G. ; Choi,S.-J. ; Moon,J.-T.
Pub. info.:
Advances in Resist Technology and Processing XVIII . 4345 pp.222-231, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
8.
Conference Proceedings
Kim,K. ; Wells,G.M. ; Kim,W.D. ; Choi,Y.-J. ; Choi,S.-J. ; Kim,Y.-S. ; Kim,D.-B.
Pub. info.:
Advances in Resist Technology and Processing XVIII . 4345 pp.168-178, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
9.
Conference Proceedings
Lee,G. ; Koh,C.-W. ; Jung,J.-C. ; Jung,M.-H. ; Kong,K.-K. ; Kim,J.-S. ; Shin,K.-S. ; Choi,S.-J. ; Kim,Y.-S. ; Choi,Y.-J. ; Kim,D.-B.
Pub. info.:
Advances in Resist Technology and Processing XVIII . 4345 pp.150-158, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
10.
Conference Proceedings
Choi,S.-J. ; Cho,J.-Y.
Pub. info.:
Advances in Resist Technology and Processing XVIII . 4345 pp.952-962, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345